{"id":3285,"date":"2025-09-18T18:02:15","date_gmt":"2025-09-18T18:02:15","guid":{"rendered":"https:\/\/ontoinnovation.com\/?post_type=products&p=3285"},"modified":"2025-11-04T15:13:10","modified_gmt":"2025-11-04T15:13:10","slug":"atlas-g6-system","status":"publish","type":"products","link":"https:\/\/ontoinnovation.com\/products\/atlas-g6-system\/","title":{"rendered":"Atlas\u00ae G6 System"},"content":{"rendered":"\n\n\n \n\n\n\n\n
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Atlas\u00ae G6 System<\/h1>\n

The Atlas G6 system is an OCD and thin film metrology tool engineered for the most advanced logic and memory devices. Designed to meet the demands of next-generation AI applications and beyond, it delivers enhanced optics, AI-driven recipe development, and tighter tool matching for superior process control. <\/p>\n<\/div>\n

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Product Overview<\/h2>\n
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As semiconductor manufacturers push into next-generation GAA nodes and next-gen HBM and vertical DRAM architectures, process control requirements are tightening. Smaller nanosheet structures and denser DRAM cells demand higher measurement precision, faster recipe development, and tighter tool-to-tool matching.<\/p>\n

The Atlas\u00ae G6 system is engineered to meet these challenges with a new optics design that improves signal-to-noise ratio, spectral stability, and measurement precision. Enhanced software algorithms and data management tools deliver better fleet-wide spectra matching, while a new data channel and next-generation model-guided machine learning in Ai Diffract\u2122 software enable faster, more robust recipe development. A smaller optical spot size ensures accurate measurements on today\u2019s most compact DRAM structures.<\/p>\n

Fully integrated with Onto Innovation\u2019s Discover\u00ae ecosystem, the Atlas G6 system empowers fabs with predictive process control and smart manufacturing capabilities\u2014accelerating yield and time to market for the industry\u2019s most advanced devices.<\/p>\n\n <\/div>\n <\/div>\n\n

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Applications<\/h3>\n